FREMONT, Calif.–Lam Research Corp. here said it is pushing forward with efforts to integrate metrology for new processes in chemical mechanical planarization (CMP) with a new tool option that combines ...
Lam Research Corp. today said it plans to integrate metrology technology from Santa Clara, Calif.-based Sensys Instruments on board Lam’s Teres chemical mechanical planarization (CMP) tools. Lam ...
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